New Picosun Fast P-200 Batch ALD Tool Designed for Fabrication of LEDs and MEMs

Picosun Oy of Finland, an (ALD) equipment manufacturer, announced the launch
of the new Picosun P-200 batch ALD system. The P-200 ALD tool is specifically
optimized for fast and efficient manufacturing of MEMS (MicroElectroMechanical
Systems, e.g. sensors and actuators), LEDs, and power electronics components.
The P-200 ALD tool is designed for wafer size 150 …

Category: infraequipprocess

via Solid State Lighting Net: http://www.sslighting.net/documents/articles/news/123595.html#top

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