Smit Ovens and SoLayTec Begin Co-operation on Large Area Spatial ALD

Smit Ovens and SoLayTec are joining forces to develop a tool for Large Area
applications of spatial ALD. the companies plan to use the tool for the
Solliance CIGS/CZTS program. Potential applications for the tool include buffer
and barrier layers for Thin film PV and layers for improved TFT structures as
required for OLED …

Category: infraequipprocess

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